Chapter 08 · Stage 8 of 15
Transistors and the Front End
Three companies make 2 nm-class transistors in volume, and TSMC promises 1.2 times the logic density for N2P over N3E and more than that for A14 over N2.
The interactive chapter adds a 3D model, glossary definitions and flashcards.
The front end of a chip factory is the part that builds the transistors, the billions of tiny switches in every chip. Each switch is a valve. Current runs along a narrow strip of silicon called the channel, and a small voltage on a gate above the strip opens or shuts the flow. Shorter strips switch faster and more of them fit on a chip, but make the strip short enough and the valve stops sealing: current leaks through even when the gate is off, and the chip burns power doing nothing. The fix is to wrap the gate around all four sides of the strip, so it can squeeze the flow shut from every side, and that takes a long sequence of steps that have to run in exact order. Only three companies, TSMC, Intel and Samsung, make these switches in volume. In 2024 the United States put a worldwide license requirement on the know-how for building them, with an exception for countries that impose matching controls. In July 2025 Rapidus in Japan said it had started making 2 nm prototypes at its new plant in Hokkaido.
In short
TSMC's N2 process, which it calls the industry's most advanced, entered volume production in late 2025 with its first nanosheet transistors[4]. TSMC's own figures give N2P 1.2 times the logic density of N3E, and A16, which adds backside power, up to 1.10 times the chip density of N2P[5]. TSMC says its A14 process, planned for production in 2028, will raise logic density by more than 20 percent over N2[23]. China made its most advanced chips, at 7 nm, with older deep ultraviolet machines stockpiled before export controls took effect, and in September 2025 CSIS judged that EUV remained firmly out of China's reach[22].
- Who leads
- TWTSMC N2 in volume production since 4Q25, TSMC's first nanosheet node
- USIntel 18A in high-volume manufacturing; 18A-P adds 9% performance at the same power
- KRSamsung Foundry First into production with gate-all-around nanosheets, starting initial 3 nm output in June 2022; SF2 family, with SF2Z adding backside power
- CNSMIC N+2 and N+3, printed in several passes on older deep-ultraviolet tools, no EUV
- JPRapidus State-backed 2 nm entrant targeting mass production in 2027
- Where it is made
- TWTaiwan TSMC N2 at Fab 20 Hsinchu and Fab 22 Kaohsiung
- USUnited States Intel 18A at Fab 52, Arizona; TSMC Arizona on N4, with N3 targeted for the second half of 2027
- KRSouth Korea Samsung Hwaseong and Pyeongtaek
- JPJapan Rapidus Chitose, Hokkaido
- CNChina SMIC Shanghai and Beijing 300 mm lines
- Why substitution is slow
- The scarce thing is the process recipe: which steps, in which order, on which tools. Three firms have written one, so a newcomer knows it can be done but has to work out its own. Rapidus in Japan, backed by the state, is now finding out what it costs to go from prototypes to volume production, with 424.95 billion yen in equity as of June 2026, state research subsidies and a 2027 target. China cannot buy extreme-ultraviolet scanners. It made its 7 nm chips on older deep-ultraviolet machines stockpiled before export controls took effect, and that keeps it behind the newest chips.
SMIC ships a process it calls N+3, measured at 113.4 million transistors per square millimeter. It prints its tightest layers in two or four passes because it cannot buy an extreme-ultraviolet scanner. Its narrowest wires sit closer together than Intel 18A's, a comparison SemiAnalysis calls an incomplete, cherry-picked metric.
Intel runs the only American-owned line that makes the newest transistors. Its 18A process brought gate-all-around transistors and backside power, where power is fed from under the transistors, to market together. Intel is also the first to use High-NA EUV scanners, the newest kind, in volume production.
A Blackwell GPU is 208 billion switches on two dies, each the largest a lithography machine can print in one shot[1]. Every switch has to turn on fully, turn off completely, and keep doing it for years. Making the switches is the front end of line; wiring them together is the back end.
How it works
Why the gate wraps around the channel
- Inside a chip. An AI chip does all its work with transistors, tiny switches built into the silicon: 208 billion of them in one Nvidia Blackwell GPU. Making the switches is the front end of the factory; wiring them together comes after.
- On. Each one is a switch. Seen end on, current flows through a strip of silicon, the channel, and the gate sits on top.
- Off, leaking. Switching off, the gate squeezes the flow shut, but only near itself. In a tiny transistor, current still leaks through the part it cannot reach.
- Fin. Stand the channel on edge as a fin, and the gate covers three sides. Much less gets through.
- All around. Split it into thin sheets and wrap the gate around every side, and it shuts tight. That lets the switches keep shrinking, and smaller switches, packed tighter, are what make each new chip faster.
Simplified. The channel is seen end on, cut across the gate, with current drawn as points of light. Not to scale.
The front end builds that valve in a fixed order. First it marks where each transistor will sit and fires atoms of boron or phosphorus into the silicon there, a step called ion implantation, so that those patches conduct the way the design needs.
Next it shapes the channel, in a FinFET by etching the silicon into thin fins standing up from the wafer and laying the gate over the top and both sides of each fin, three sides instead of one. In a gate-all-around transistor the fab instead grows alternating layers of silicon and silicon-germanium, cuts the stack into a narrow bar, then dissolves the silicon-germanium away, leaving thin silicon sheets held at their ends like shelves, and fills the gaps above, below and beside each sheet with gate metal, all four sides. Before the metal goes in, a film of insulator a few atoms thick is laid over every sheet, so that the gate controls the channel without touching it. Last come the contacts, small metal plugs down to the two ends of the channel and to the gate, ready for the wiring layers above.
Each of those is a deposition, an etch or an implant of its own, and they have to run in exact order, since a sheet cannot be wrapped once the metal is on, nor the insulator added once it is buried.
Current leaks two ways, straight through the gate insulator and along the channel from end to end while the gate is off. The second is called short-channel leakage, and wrapping the gate around the channel reduces it. Three fixes deal with the two leaks:
- Better insulator. A thicker hafnium-based film, paired with a metal gate, lets fewer electrons slip straight through yet controls the channel as tightly as before. Intel replaced silicon dioxide with it at 45 nm in 2007 and said it cut leakage through the insulator more than tenfold and, with the metal gate, leakage along the channel more than fivefold[2].
- More gate. Wrap gate metal around more sides of the channel, as fins and nanosheets do.
- Thinner channel. Thin the silicon until no current can flow where the gate cannot reach it.
Variants and trade-offs
Planar and FinFET
A planar transistor lays the gate on one side of a flat channel, and loses control as the channel shortens. A fin stands the channel on edge so the gate covers three sides, but current then comes in whole fins: a designer who needs more adds one, and nobody gets half a fin.
Gate-all-around nanosheets
A nanosheet lays the channel back down, stacks two to four thin sheets and threads gate metal around each one. The sheets can be drawn at different widths, so current comes in fine steps again. TSMC sells this as NanoFlex, which lets designers mix short cells for small area with tall cells for performance[3].
N2 entered volume production in the fourth quarter of 2025, TSMC's first nanosheet node[4]. TSMC rates the follow-on N2P at 18 percent more speed at the same power, 36 percent less power at the same speed, and 1.2 times the logic density of N3E[5]. Intel's RibbonFET shipped on 18A, and 18A-P adds another 9 percent performance at the same power[6]. Samsung began initial production of its 3 nm gate-all-around process in June 2022, more than three years before TSMC's N2[7].
Those numbers are vendor claims until someone measures the silicon. Each foundry picks its own baseline, and none publishes a density figure that can be set against a rival's.
TSMC's published chip density gain over the baseline it names, A16 at its upper bound%
| N2P vs N3E | 15 % |
|---|---|
| A16 backside power vs N2P | 10 % |
Backside power delivery
Power and signal share one stack of copper wiring above the transistors, where wide power rails crowd out the signal wires. Backside power grinds the wafer thin and builds a second network underneath it.
Intel shipped it first as PowerVia: on 18A, an 11 percent cut in routed area and a tenfold cut in dynamic voltage droop, the sag in supply voltage when a block of logic switches on at once[6]. TSMC's Super Power Rail lands that network straight on each transistor's source and drain, with no buried rail between, which is harder to build and gives more: against N2P, A16 gives 8 to 10 percent more speed, 15 to 20 percent less power and up to 1.10 times the chip density[5].
TSMC said in April 2026 that A13, a direct shrink of A14 with 6 percent area savings, and A12, which adds Super Power Rail to the A14 platform, are both scheduled to enter production in 2029[8].
TSMC's logic roadmap beyond N2, from its own announcements
- 2028-01-01N2U, 3-4% faster or 8-10% lower power than N2P
- 2028-01-01A14, up to 15% faster and more than 20% denser than N2
- 2029-01-01A13, a direct shrink of A14 for 6% area savings
- 2029-01-01A12, the A14 platform with Super Power Rail backside power
CFET and what comes after
A logic gate needs two transistors that switch on opposite signals, and today they sit side by side. The research institute imec sees complementary FETs, which stack the two on top of each other, as an attractive design for logic nodes beyond 1 nm[9].
The back end of line
Wiring is now as hard to make as the transistor. Copper seeps into the insulator around it, so every wire needs a barrier, a liner and a cap, and as the most critical wiring levels drop below a 20 nm pitch those extra layers take a large share of the wire's width[10]. Two metals are moving into those narrow levels.
- Ruthenium shows promise for use without a barrier, which would keep the wire's resistance low[10]. imec has demonstrated ruthenium lines at a 16 nm pitch[11].
- Molybdenum conducts worse in bulk, 5.3 against copper's 1.68 microhm-cm, but in a thin film it beats tungsten by up to 30 percent and needs no barrier either, which is moving it into some contacts and local wiring layers[12].
Who makes it
TSMC, Intel and Samsung build gate-all-around nodes with extreme ultraviolet lithography. SMIC builds 7 nm-class nodes without it[13]. In July 2025 state-backed Rapidus said it had started making 2 nm prototypes at its plant in Chitose, Hokkaido, and would begin mass production in 2027[14]. By June 2026 it had raised 424.95 billion yen in equity, the latest 150 billion yen from a state agency, and it has received government research subsidies since fiscal 2022[15].
Node names describe nothing physical. SMIC's N+3, its third-generation 7 nm process, sets its narrowest wires 32.5 nm apart, tighter than Intel 18A's 36 nm, and reaches 113.4 million transistors per square millimeter against 107.7 for TSMC's N6[13].
AI accelerators have usually trailed the leading edge, since a very large die comes out working reliably only on a process that has run for years. Blackwell uses a custom TSMC 4NP[1]. AMD's MI455X, launched on 23 July 2026, lists TSMC 2 nm and 3 nm silicon[16]. It spreads its compute across eight separate dies[17].
SRAM, the fast memory on the logic die, is the scaling failure that hurts AI chips most. TSMC claims 22 percent more SRAM density from N3E to N2, but the gain comes mostly from the circuits around the array, and the cell that holds one bit shrinks little or not at all[18]. See Memory and HBM.
The chokepoint
No single machine makes the front end a chokepoint. The recipe does, and a recipe is which steps run in which order on which tools. In September 2024 the United States put a worldwide license requirement on the know-how for building gate-all-around transistors, with an exception for countries that impose matching controls[19].
China shows what that recipe costs. The third National Integrated Circuit Fund launched in May 2024 with 344 billion yuan, about $47 billion[20], so money is not the constraint; tools are. A Shanghai state firm began building domestic immersion scanners in 2026 and planned about five that year and roughly 20 in 2027[21]. Those are deep-ultraviolet machines, a generation behind EUV, and SMIC gets fine features out of them by printing its tightest layers in several passes. That volume keeps those lines running and comes nowhere near replacing ASML. EUV is further away: China has announced $43 billion for domestic development, and the Center for Strategic and International Studies judged in September 2025 that EUV remains firmly out of reach despite massive state investment[22].
See Lithography and Geopolitics.
Key evaluation criteria
- Electrostatic control. How far the gate wraps the channel. It sets how much the switch leaks when off, and the lowest supply voltage it can run on.
- Density. Transistors per square millimeter, comparable only inside one foundry's own numbering and for one kind of cell.
- Interconnect resistance. Below a 20 nm wire spacing, copper wiring adds more and more delay from its resistance and capacitance[11].
- Power delivery. The voltage lost carrying power across the die. Backside power frees area and cuts the droop tenfold[6].
- SRAM scaling. The cell that holds one bit has barely shrunk since the 5 nm node, which caps how much cache an accelerator can afford[18].
- Cost per transistor. No foundry publishes wafer prices, so it cannot be worked out from public figures.
Review questions
Open a question to see its answer.
Why do the newest transistors wrap the gate around the channel?
To stop current leaking when the switch is off.
Shorter channels switch faster but leak. A gate on all four sides can shut the flow off completely. Reread: How it works
Which companies make these gate-all-around transistors in volume?
TSMC, Intel and Samsung.
Samsung began initial 3 nm production with them in June 2022, TSMC's N2 entered volume production in the fourth quarter of 2025, and Intel's 18A is in high-volume manufacturing. Reread: Who makes it
Why is the front end hard for a new firm to enter?
No firm sells its process recipe, the exact sequence of steps that builds the transistors.
A newcomer has to develop its own. Reread: The chokepoint
How does China's SMIC make advanced chips without an EUV machine?
It prints its tightest layers in two or four passes on deep-ultraviolet tools.
Its N+3 process is a 7 nm-class node. It works this way because it cannot buy an extreme-ultraviolet scanner. Reread: The chokepoint
Sources (23)
- ANVIDIA Blackwell Architecture
- AIntel's Transistor Technology Breakthrough Represents Biggest Change to Computer Chips in 40 Years
- ATSMC Celebrates 30th North America Technology Symposium with Innovations Powering AI with Silicon Leadership
- A2nm Technology
- AHPC Platform – Advanced Technologies
- AIntel Foundry Details Process Milestones and Future Innovation at VLSI Symposium
- ASamsung Begins Chip Production Using 3nm Process Technology With GAA Architecture
- ATSMC Debuts A13 Technology at 2026 North America Technology Symposium
- ACFET (complementary FET)
- ASemi-damascene metallization
- A16nm Ru lines using semi-damascene integration approach
- AMolybdenum’s Role in Ultra-Fast Computing: The Metal Behind the Speed
- BIs SMIC N+3’s Metal Pitch Smaller than Intel 18A’s?
- ARapidus Achieves Significant Milestone at its State-of-the-Art Foundry with Prototyping of Leading-Edge 2nm GAA Transistors
- ARapidus Completes 150 Billion Yen Funding Round from Japan Government
- AAMD Instinct™ MI455X GPUs
- AAMD Instinct MI455X GPU
- BClash of the Foundries: Gate All Around + Backside Power at 2nm
- ACommerce Control List Additions and Revisions; Implementation of Controls on Advanced Technologies Consistent With Controls Implemented by International Partners
- BChina launches $47bn chip fund to counter U.S. restrictions
- BChina starts production of home-grown immersion DUV chipmaking tools, source says
- ABreakthroughs or Boasts? Assessing Recent Chinese Lithography Advancements
- ATSMC Unveils Next-Generation A14 Process at North America Technology Symposium